Title:

The study of the good polishing method for polymer SU-8 waveguide

Group publication title:

Optica Applicata

Creator:

Ab-Rahman, Mohammad Syuhaimi ; Ab-Aziz, Fazlinda ; Mohd Arif, Noor Azie Azura ; Zan, Saiful Dzulkefly ; Mustaza, Seri Mastura ; Ehsan, Abang Anuar ; Shaari, Sahbudin

Contributor:

Gaj, Miron. Redakcja ; Urbańczyk, Wacław. Redakcja

Subject and Keywords:

optyka ; waveguides polishing ; SU-8 polymer ; rotational speed ; sandpaper ; silicon ; cut off length

Description:

Optica Applicata, Vol. 39, 2009, nr 3, s. 459-465

Abstrakt:

This research focused on polish characteristic of polymer based waveguides. The aim of the research was to show how polishing parameters affect the cut length of the end surface of SU-8 polymer on silicon and to detemine the best parameters for polishing SU-8 polymer. Then, four samples were used for characterizing the polishing of polymer. Each sample was polished with the same rotation and sandpaper size but with different rotational speed. The experiment result shows that the best rotational speed for polishing polymer SU-8 sample on silicon is 200 rpm.

Publisher:

Oficyna Wydawnicza Politechniki Wrocławskiej

Place of publication:

Wrocław

Date:

2009

Resource Type:

artykuł

Source:

<sygn. PWr A3481II> ; click here to follow the link ; click here to follow the link

Language:

eng

Relation:

Optica Applicata ; Optica Applicata, Vol. 39, 2009 ; Optica Applicata, Vol. 39, 2009, nr 3 ; Politechnika Wrocławska. Wydział Podstawowych Problemów Techniki

Rights:

Wszystkie prawa zastrzeżone (Copyright)

Access Rights:

Dla wszystkich w zakresie dozwolonego użytku

Location:

Politechnika Wrocławska